Research Status and Progress on Non-Destructive Testing Methods for Defect Inspection of Micro-Electronic PackagingSource: Journal of Electronic Packaging:;2024:;volume( 146 ):;issue: 003::page 30801-1DOI: 10.1115/1.4064361Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: In a highly competitive and demanding micro-electronics market, non-destructive testing (NDT) technology has been widely applied to defect detection and evaluation of micro-electronic packaging. However, the trend of micro-electronic packaging toward miniaturization, high-density, ultrathin, ultralight, and with small chip footprint, poses an urgent demand for novel NDT methods with high-resolution and large penetration depth, which is utilized for internal defect detection and identification of advanced complicated packages. The conventional NDT methods for micro-electronic packaging mainly include optical visual inspection, X-ray inspection, active infrared thermography, scanning acoustic microscopy (SAM), atomic force microscopy (AFM), laser Doppler vibration measuring technique, scanning SQUID microscopy (SSM), electrical impedance spectroscopy, scanning electron microscope (SEM), and so on. This paper aims to provide a review of addressing their basic principles, advantages, limitations, and application researches in the field of defect inspection of micro-electronic packaging. Moreover, in order to overcome the shortcomings of the existing NDT methods, this paper emphasizes a novel NDT approach, called hybrid ultrasonic-laser digital holographic microscopy (DHM) imaging inspection method, and discusses its basic principle, merits, key techniques, system construction, and experimental results in detail. When some key technical problems can be solved in further research, this method will become a potentially promising technique for defect detection and evaluation of advanced complicated packages.
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contributor author | Chen, Yuan | |
contributor author | Wang, Zhongyang | |
contributor author | Fan, Yuhui | |
contributor author | Dong, Ming | |
contributor author | Liu, Dengxue | |
date accessioned | 2024-04-24T22:22:16Z | |
date available | 2024-04-24T22:22:16Z | |
date copyright | 3/8/2024 12:00:00 AM | |
date issued | 2024 | |
identifier issn | 1043-7398 | |
identifier other | ep_146_03_030801.pdf | |
identifier uri | http://yetl.yabesh.ir/yetl1/handle/yetl/4295088 | |
description abstract | In a highly competitive and demanding micro-electronics market, non-destructive testing (NDT) technology has been widely applied to defect detection and evaluation of micro-electronic packaging. However, the trend of micro-electronic packaging toward miniaturization, high-density, ultrathin, ultralight, and with small chip footprint, poses an urgent demand for novel NDT methods with high-resolution and large penetration depth, which is utilized for internal defect detection and identification of advanced complicated packages. The conventional NDT methods for micro-electronic packaging mainly include optical visual inspection, X-ray inspection, active infrared thermography, scanning acoustic microscopy (SAM), atomic force microscopy (AFM), laser Doppler vibration measuring technique, scanning SQUID microscopy (SSM), electrical impedance spectroscopy, scanning electron microscope (SEM), and so on. This paper aims to provide a review of addressing their basic principles, advantages, limitations, and application researches in the field of defect inspection of micro-electronic packaging. Moreover, in order to overcome the shortcomings of the existing NDT methods, this paper emphasizes a novel NDT approach, called hybrid ultrasonic-laser digital holographic microscopy (DHM) imaging inspection method, and discusses its basic principle, merits, key techniques, system construction, and experimental results in detail. When some key technical problems can be solved in further research, this method will become a potentially promising technique for defect detection and evaluation of advanced complicated packages. | |
publisher | The American Society of Mechanical Engineers (ASME) | |
title | Research Status and Progress on Non-Destructive Testing Methods for Defect Inspection of Micro-Electronic Packaging | |
type | Journal Paper | |
journal volume | 146 | |
journal issue | 3 | |
journal title | Journal of Electronic Packaging | |
identifier doi | 10.1115/1.4064361 | |
journal fristpage | 30801-1 | |
journal lastpage | 30801-13 | |
page | 13 | |
tree | Journal of Electronic Packaging:;2024:;volume( 146 ):;issue: 003 | |
contenttype | Fulltext |