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contributor authorChen, Yuan
contributor authorWang, Zhongyang
contributor authorFan, Yuhui
contributor authorDong, Ming
contributor authorLiu, Dengxue
date accessioned2024-04-24T22:22:16Z
date available2024-04-24T22:22:16Z
date copyright3/8/2024 12:00:00 AM
date issued2024
identifier issn1043-7398
identifier otherep_146_03_030801.pdf
identifier urihttp://yetl.yabesh.ir/yetl1/handle/yetl/4295088
description abstractIn a highly competitive and demanding micro-electronics market, non-destructive testing (NDT) technology has been widely applied to defect detection and evaluation of micro-electronic packaging. However, the trend of micro-electronic packaging toward miniaturization, high-density, ultrathin, ultralight, and with small chip footprint, poses an urgent demand for novel NDT methods with high-resolution and large penetration depth, which is utilized for internal defect detection and identification of advanced complicated packages. The conventional NDT methods for micro-electronic packaging mainly include optical visual inspection, X-ray inspection, active infrared thermography, scanning acoustic microscopy (SAM), atomic force microscopy (AFM), laser Doppler vibration measuring technique, scanning SQUID microscopy (SSM), electrical impedance spectroscopy, scanning electron microscope (SEM), and so on. This paper aims to provide a review of addressing their basic principles, advantages, limitations, and application researches in the field of defect inspection of micro-electronic packaging. Moreover, in order to overcome the shortcomings of the existing NDT methods, this paper emphasizes a novel NDT approach, called hybrid ultrasonic-laser digital holographic microscopy (DHM) imaging inspection method, and discusses its basic principle, merits, key techniques, system construction, and experimental results in detail. When some key technical problems can be solved in further research, this method will become a potentially promising technique for defect detection and evaluation of advanced complicated packages.
publisherThe American Society of Mechanical Engineers (ASME)
titleResearch Status and Progress on Non-Destructive Testing Methods for Defect Inspection of Micro-Electronic Packaging
typeJournal Paper
journal volume146
journal issue3
journal titleJournal of Electronic Packaging
identifier doi10.1115/1.4064361
journal fristpage30801-1
journal lastpage30801-13
page13
treeJournal of Electronic Packaging:;2024:;volume( 146 ):;issue: 003
contenttypeFulltext


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