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    Modeling and Dynamic Characterization of the Czochralski Crystal Growth Process

    Source: Journal of Dynamic Systems, Measurement, and Control:;1993:;volume( 115 ):;issue: 001::page 109
    Author:
    M. A. Gevelber
    ,
    G. Stephanopoulos
    DOI: 10.1115/1.2897384
    Publisher: The American Society of Mechanical Engineers (ASME)
    Abstract: A lumped parameter model of the Czochralski crystal growth process is proposed that captures the dominant nonlinear dynamics, internal coupling, and disturbance structure. Conventional and advanced actuators are modeled. The dynamic characteristics of the interface shape and input/outputs that limit the achievable controller performance are identified.
    keyword(s): Crystal growth , Modeling , Shapes , Nonlinear dynamics , Control equipment , Actuators AND Lumped parameter models ,
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      Modeling and Dynamic Characterization of the Czochralski Crystal Growth Process

    URI
    http://yetl.yabesh.ir/yetl1/handle/yetl/111711
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    contributor authorM. A. Gevelber
    contributor authorG. Stephanopoulos
    date accessioned2017-05-08T23:40:56Z
    date available2017-05-08T23:40:56Z
    date copyrightMarch, 1993
    date issued1993
    identifier issn0022-0434
    identifier otherJDSMAA-26191#109_1.pdf
    identifier urihttp://yetl.yabesh.ir/yetl/handle/yetl/111711
    description abstractA lumped parameter model of the Czochralski crystal growth process is proposed that captures the dominant nonlinear dynamics, internal coupling, and disturbance structure. Conventional and advanced actuators are modeled. The dynamic characteristics of the interface shape and input/outputs that limit the achievable controller performance are identified.
    publisherThe American Society of Mechanical Engineers (ASME)
    titleModeling and Dynamic Characterization of the Czochralski Crystal Growth Process
    typeJournal Paper
    journal volume115
    journal issue1
    journal titleJournal of Dynamic Systems, Measurement, and Control
    identifier doi10.1115/1.2897384
    journal fristpage109
    journal lastpage114
    identifier eissn1528-9028
    keywordsCrystal growth
    keywordsModeling
    keywordsShapes
    keywordsNonlinear dynamics
    keywordsControl equipment
    keywordsActuators AND Lumped parameter models
    treeJournal of Dynamic Systems, Measurement, and Control:;1993:;volume( 115 ):;issue: 001
    contenttypeFulltext
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    DSpace software copyright © 2002-2015  DuraSpace
    نرم افزار کتابخانه دیجیتال "دی اسپیس" فارسی شده توسط یابش برای کتابخانه های ایرانی | تماس با یابش
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