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contributor authorM. A. Gevelber
contributor authorG. Stephanopoulos
date accessioned2017-05-08T23:40:56Z
date available2017-05-08T23:40:56Z
date copyrightMarch, 1993
date issued1993
identifier issn0022-0434
identifier otherJDSMAA-26191#109_1.pdf
identifier urihttp://yetl.yabesh.ir/yetl/handle/yetl/111711
description abstractA lumped parameter model of the Czochralski crystal growth process is proposed that captures the dominant nonlinear dynamics, internal coupling, and disturbance structure. Conventional and advanced actuators are modeled. The dynamic characteristics of the interface shape and input/outputs that limit the achievable controller performance are identified.
publisherThe American Society of Mechanical Engineers (ASME)
titleModeling and Dynamic Characterization of the Czochralski Crystal Growth Process
typeJournal Paper
journal volume115
journal issue1
journal titleJournal of Dynamic Systems, Measurement, and Control
identifier doi10.1115/1.2897384
journal fristpage109
journal lastpage114
identifier eissn1528-9028
keywordsCrystal growth
keywordsModeling
keywordsShapes
keywordsNonlinear dynamics
keywordsControl equipment
keywordsActuators AND Lumped parameter models
treeJournal of Dynamic Systems, Measurement, and Control:;1993:;volume( 115 ):;issue: 001
contenttypeFulltext


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