Decoupling of a Disk Resonator From Linear Acceleration Via Mass Matrix Perturbation

Abstract

Axisymmetric microelectromechanical (MEM) vibratory rate gyroscopes are designed so the central post which attaches the resonator to the sensor case is a nodal point of the two Coriolis-coupled modes that are exploited for angular rate sensing. This configuration eliminates any coupling of linear acceleration to these modes. When the gyro resonators are fabricated, however, small mass and stiffness asymmetries cause coupling of these modes to linear acceleration of the sensor case. In a resonator postfabrication step, this coupling can be reduced by altering the mass distribution on the resonator so that its center of mass is stationary while the operational modes vibrate. In this paper, a scale model of the disk resonator gyroscope (DRG) is used to develop and test methods that significantly reduce linear acceleration coupling.