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    An Iterative-Based Feedforward-Feedback Control Approach to High-Speed Atomic Force Microscope Imaging

    Source: Journal of Dynamic Systems, Measurement, and Control:;2009:;volume( 131 ):;issue: 006::page 61105
    Author:
    Ying Wu
    ,
    Qingze Zou
    DOI: 10.1115/1.4000137
    Publisher: The American Society of Mechanical Engineers (ASME)
    Abstract: This article presents an iterative-based feedforward-feedback control approach to achieve high-speed atomic force microscope (AFM) imaging. AFM-imaging requires precision positioning of the probe relative to the sample in all x-y-z axes directions. Particularly, this article is focused on the vertical z-axis positioning. Recently, a current-cycle-feedback iterative-learning-control (CCF-ILC) approach has been developed for precision tracking of a given desired trajectory (even when the desired trajectory is unknown), which can be applied to achieve precision tracking of sample profile on one scanline. In this article, we extend this CCF-ILC approach to imaging of entire sample area. The main contribution of this article is the convergence analysis and the use of the CCF-ILC approach for output tracking in the presence of desired trajectory varation between iterations—the sample topography variations between adjacent scanlines. For general case where the desired trajectory variation occurs between any two successive iterations, the convergence (stability) of the CCF-ILC system is addressed and the allowable size of desired trajectory variation is quantified. The performance improvement achieved by using the CCF-ILC approach is discussed by comparing the tracking error of using the CCF-ILC technique to that of using feedback control alone. The efficacy of the proposed CCF-ILC control approach is illustrated by implementing it to the z-axis control during AFM-imaging. Experimental results are presented to show that the AFM-imaging speed can be substantially increased.
    keyword(s): Atomic force microscopy , Errors , Feedback , Imaging , Iterative learning control , Feedforward control AND Design ,
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      An Iterative-Based Feedforward-Feedback Control Approach to High-Speed Atomic Force Microscope Imaging

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    http://yetl.yabesh.ir/yetl1/handle/yetl/140160
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    contributor authorYing Wu
    contributor authorQingze Zou
    date accessioned2017-05-09T00:32:06Z
    date available2017-05-09T00:32:06Z
    date copyrightNovember, 2009
    date issued2009
    identifier issn0022-0434
    identifier otherJDSMAA-26505#061105_1.pdf
    identifier urihttp://yetl.yabesh.ir/yetl/handle/yetl/140160
    description abstractThis article presents an iterative-based feedforward-feedback control approach to achieve high-speed atomic force microscope (AFM) imaging. AFM-imaging requires precision positioning of the probe relative to the sample in all x-y-z axes directions. Particularly, this article is focused on the vertical z-axis positioning. Recently, a current-cycle-feedback iterative-learning-control (CCF-ILC) approach has been developed for precision tracking of a given desired trajectory (even when the desired trajectory is unknown), which can be applied to achieve precision tracking of sample profile on one scanline. In this article, we extend this CCF-ILC approach to imaging of entire sample area. The main contribution of this article is the convergence analysis and the use of the CCF-ILC approach for output tracking in the presence of desired trajectory varation between iterations—the sample topography variations between adjacent scanlines. For general case where the desired trajectory variation occurs between any two successive iterations, the convergence (stability) of the CCF-ILC system is addressed and the allowable size of desired trajectory variation is quantified. The performance improvement achieved by using the CCF-ILC approach is discussed by comparing the tracking error of using the CCF-ILC technique to that of using feedback control alone. The efficacy of the proposed CCF-ILC control approach is illustrated by implementing it to the z-axis control during AFM-imaging. Experimental results are presented to show that the AFM-imaging speed can be substantially increased.
    publisherThe American Society of Mechanical Engineers (ASME)
    titleAn Iterative-Based Feedforward-Feedback Control Approach to High-Speed Atomic Force Microscope Imaging
    typeJournal Paper
    journal volume131
    journal issue6
    journal titleJournal of Dynamic Systems, Measurement, and Control
    identifier doi10.1115/1.4000137
    journal fristpage61105
    identifier eissn1528-9028
    keywordsAtomic force microscopy
    keywordsErrors
    keywordsFeedback
    keywordsImaging
    keywordsIterative learning control
    keywordsFeedforward control AND Design
    treeJournal of Dynamic Systems, Measurement, and Control:;2009:;volume( 131 ):;issue: 006
    contenttypeFulltext
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    نرم افزار کتابخانه دیجیتال "دی اسپیس" فارسی شده توسط یابش برای کتابخانه های ایرانی | تماس با یابش
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    DSpace software copyright © 2002-2015  DuraSpace
    نرم افزار کتابخانه دیجیتال "دی اسپیس" فارسی شده توسط یابش برای کتابخانه های ایرانی | تماس با یابش
    yabeshDSpacePersian