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    Simultaneous Electrothermal Test Method for Pyroelectric Microsensors

    Source: Journal of Electronic Packaging:;2007:;volume( 129 ):;issue: 004::page 504
    Author:
    Brian Smith
    ,
    Cristina Amon
    DOI: 10.1115/1.2804101
    Publisher: The American Society of Mechanical Engineers (ASME)
    Abstract: Pyroelectric film materials, including polyvinylidene fluoride (PVDF) and its copolymers (e.g., P(VDF/trifluoroethylene)), are attractive candidates for low-cost infrared detection and imaging applications due to their compatibility with complementary metal-oxide semiconductor processing and inexpensive packaging requirements compared to semiconductor-based detectors. The pyroelectric coefficient (p) describes the material’s electric response to a change in sensor temperature and is the main contributor to the sensitivity and detectivity of the system. However, this value can vary greatly with film fabrication and poling processes, and its measurement is often highly coupled to the material’s thermal diffusivity. This paper describes a new approach to film characterization that combines the popular “3-omega” technique for thermal characterization with a modified version of the laser intensity modulation method for determining the film’s pyroelectric coefficient. The new method is capable of simultaneously measuring film conductivity, diffusivity, and pyroelectric coefficient. It could increase the accuracy of the pyroelectric measurements by providing in situ thermal data to the electrical model instead of relying on published values or thermal measurements of a different sample. We also present a fabrication process that can be used to pole and measure a variety of pyroelectric materials and a mathematical framework to study the thermal phenomena of the setup. The thermal model is used to highlight the methodology’s sensitivity to uncertainties in the geometric and material property values of the layers surrounding the pyroelectric film.
    keyword(s): Heat , Temperature , Sensors , Manufacturing , Thermal properties , Thermal diffusion , Measurement , Impedance (Electricity) , Strips , Boundary-value problems , Conductivity , Microsensors , Frequency , Metals , Lasers AND Semiconductors (Materials) ,
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      Simultaneous Electrothermal Test Method for Pyroelectric Microsensors

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    http://yetl.yabesh.ir/yetl1/handle/yetl/135537
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    contributor authorBrian Smith
    contributor authorCristina Amon
    date accessioned2017-05-09T00:23:20Z
    date available2017-05-09T00:23:20Z
    date copyrightDecember, 2007
    date issued2007
    identifier issn1528-9044
    identifier otherJEPAE4-26280#504_1.pdf
    identifier urihttp://yetl.yabesh.ir/yetl/handle/yetl/135537
    description abstractPyroelectric film materials, including polyvinylidene fluoride (PVDF) and its copolymers (e.g., P(VDF/trifluoroethylene)), are attractive candidates for low-cost infrared detection and imaging applications due to their compatibility with complementary metal-oxide semiconductor processing and inexpensive packaging requirements compared to semiconductor-based detectors. The pyroelectric coefficient (p) describes the material’s electric response to a change in sensor temperature and is the main contributor to the sensitivity and detectivity of the system. However, this value can vary greatly with film fabrication and poling processes, and its measurement is often highly coupled to the material’s thermal diffusivity. This paper describes a new approach to film characterization that combines the popular “3-omega” technique for thermal characterization with a modified version of the laser intensity modulation method for determining the film’s pyroelectric coefficient. The new method is capable of simultaneously measuring film conductivity, diffusivity, and pyroelectric coefficient. It could increase the accuracy of the pyroelectric measurements by providing in situ thermal data to the electrical model instead of relying on published values or thermal measurements of a different sample. We also present a fabrication process that can be used to pole and measure a variety of pyroelectric materials and a mathematical framework to study the thermal phenomena of the setup. The thermal model is used to highlight the methodology’s sensitivity to uncertainties in the geometric and material property values of the layers surrounding the pyroelectric film.
    publisherThe American Society of Mechanical Engineers (ASME)
    titleSimultaneous Electrothermal Test Method for Pyroelectric Microsensors
    typeJournal Paper
    journal volume129
    journal issue4
    journal titleJournal of Electronic Packaging
    identifier doi10.1115/1.2804101
    journal fristpage504
    journal lastpage511
    identifier eissn1043-7398
    keywordsHeat
    keywordsTemperature
    keywordsSensors
    keywordsManufacturing
    keywordsThermal properties
    keywordsThermal diffusion
    keywordsMeasurement
    keywordsImpedance (Electricity)
    keywordsStrips
    keywordsBoundary-value problems
    keywordsConductivity
    keywordsMicrosensors
    keywordsFrequency
    keywordsMetals
    keywordsLasers AND Semiconductors (Materials)
    treeJournal of Electronic Packaging:;2007:;volume( 129 ):;issue: 004
    contenttypeFulltext
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    DSpace software copyright © 2002-2015  DuraSpace
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