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contributor authorC. Y. Hui
contributor authorH. D. Conway
contributor authorY. Y. Lin
date accessioned2017-05-09T00:02:11Z
date available2017-05-09T00:02:11Z
date copyrightSeptember, 2000
date issued2000
identifier issn1528-9044
identifier otherJEPAE4-26184#267_1.pdf
identifier urihttp://yetl.yabesh.ir/yetl/handle/yetl/123547
description abstractThe residual stresses in thin films are explained using elementary mechanics. In particular, the range of validity of the well-known Stoney’s formula is examined using a strength of materials approach. An improved formula is obtained. The results of these analyses can also be used to compute energy release rates for cracks in thin film systems. Some simple examples of such applications are given. [S1043-7398(00)01603-0]
publisherThe American Society of Mechanical Engineers (ASME)
titleA Reexamination of Residual Stresses in Thin Films and of the Validity of Stoney’s Estimate
typeJournal Paper
journal volume122
journal issue3
journal titleJournal of Electronic Packaging
identifier doi10.1115/1.1287930
journal fristpage267
journal lastpage273
identifier eissn1043-7398
keywordsComposite materials
keywordsResidual stresses
keywordsStress
keywordsFormulas
keywordsThin films AND Deformation
treeJournal of Electronic Packaging:;2000:;volume( 122 ):;issue: 003
contenttypeFulltext


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