Environmental Scanning Electron Microscopic Investigation of Failure Mechanisms in Electronic Packages

Abstract

Environmental Scanning Electron Microscopy (E-SEM) is a technique which provides the capability to investigate surface morphologies over a variety of controllable environmental conditions. This paper discusses the principal of the E-SEM and presents three experimental investigations of failure mechanisms in electronic packages using E-SEM techniques. The first is a study of thermally induced failures of MMIC devices. The second investigation focuses on mechano-sorptive properties of multilayer thin-film polyimides. The third investigation concentrates on relative humidity and thermal cycling effects on interfacial bonding characteristics of resin/fiber interfaces in printed wiring boards, and microcracks surrounding plated-through-holes.