| contributor author | M. A. Gevelber | |
| contributor author | G. Stephanopoulos | |
| date accessioned | 2017-05-08T23:40:56Z | |
| date available | 2017-05-08T23:40:56Z | |
| date copyright | March, 1993 | |
| date issued | 1993 | |
| identifier issn | 0022-0434 | |
| identifier other | JDSMAA-26191#115_1.pdf | |
| identifier uri | http://yetl.yabesh.ir/yetl/handle/yetl/111713 | |
| description abstract | An expanded set of control objectives is proposed for the Czochralski crystal growth process. Consideration of the thermal stress near the interface yields an operating regime specification in terms of interface shape. A lumped parameter model is used to determine the performance of alternate inputs and outputs. Based on these considerations, a new control structure is proposed to maintain crystal diameter, interface shape, and thermal gradients throughout the batch growth cycle. The performance of alternative control structures are evaluated. | |
| publisher | The American Society of Mechanical Engineers (ASME) | |
| title | Control and System Design for the Czochralski Crystal Growth Process | |
| type | Journal Paper | |
| journal volume | 115 | |
| journal issue | 1 | |
| journal title | Journal of Dynamic Systems, Measurement, and Control | |
| identifier doi | 10.1115/1.2897385 | |
| journal fristpage | 115 | |
| journal lastpage | 121 | |
| identifier eissn | 1528-9028 | |
| keywords | Crystal growth | |
| keywords | Design | |
| keywords | Shapes | |
| keywords | Temperature gradients | |
| keywords | Crystals | |
| keywords | Lumped parameter models | |
| keywords | Cycles AND Thermal stresses | |
| tree | Journal of Dynamic Systems, Measurement, and Control:;1993:;volume( 115 ):;issue: 001 | |
| contenttype | Fulltext | |