A New Surface Finishing Process for Quartz Glass Rotary Parts Based on Changes in Wetting State

Abstract

Quartz glass has wide applications in semiconductor technology, optical communication, optical instruments, inertial navigation, and other fields. Quartz glass parts are commonly machined by mechanical methods, and in general, there is a certain thickness of damage layer on the surface after processing. To improve the surface quality of quartz glass parts, this study proposes a chemical surface finishing process for the quartz glass rotary parts based on changes in wetting state. Corrosion droplet on the surface of quartz glass is used to selectively remove materials, thereby reducing surface roughness. The experimental results show that using buffered oxide etch to form corrosion droplets for surface chemical finishing can reduce the Sa value on the surface of quartz glass rotary parts from 104 nm to 74 nm after 2 min of processing with a surface velocity of 26.2 m/s. In addition, for quartz glass rotary parts with different pretreatment methods, all of the surface roughness Sa values of the workpiece are reduced, after chemical surface finishing.