Scanning Micro-Electrochemical Machining Process for V-Shaped Grooves

Abstract

Microstructures determine flow properties of microfluidic chip. Micromold forming is an effective method to realize mass manufacturing of microfluidic chips. This requires to machine some kind of special microstructure of high surface quality on a metal/alloy workpiece. Micro V-shaped grooves are the typical microstructures of the chip micromolds used for controlling microfluid or weld packaging. In this research, a scanning micro-electrochemical machining (ECM) process of V-shaped grooves is proposed using a tool electrode fabricated by micro–electrical discharge machining (EDM) on-machine. Theoretical and experimental research was conducted for achieving the V-shaped grooves with a given angle on die steel. A long-distance V-shaped groove with the given angle of 67 deg and the depth of 125 μm was successfully machined.