A Low-Cost, Automated Wafer Loading System With Submicron Alignment Accuracy for Nanomanufacturing and Nanometrology ApplicationsSource: Journal of Micro and Nano-Manufacturing:;2016:;volume( 004 ):;issue: 004::page 41006Author:Duenner, Andrew
,
Yao, Tsung-Fu
,
De Hoyos, Bruno
,
Gonzales, Marianna
,
Riojas, Nathan
,
Cullinan, Michael
DOI: 10.1115/1.4034610Publisher: The American Society of Mechanical Engineers (ASME)
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| contributor author | Duenner, Andrew | |
| contributor author | Yao, Tsung-Fu | |
| contributor author | De Hoyos, Bruno | |
| contributor author | Gonzales, Marianna | |
| contributor author | Riojas, Nathan | |
| contributor author | Cullinan, Michael | |
| date accessioned | 2017-11-25T07:18:35Z | |
| date available | 2017-11-25T07:18:35Z | |
| date copyright | 2016/10/10 | |
| date issued | 2016 | |
| identifier issn | 2166-0468 | |
| identifier other | jmnm_004_04_041006.pdf | |
| identifier uri | http://138.201.223.254:8080/yetl1/handle/yetl/4235260 | |
| publisher | The American Society of Mechanical Engineers (ASME) | |
| title | A Low-Cost, Automated Wafer Loading System With Submicron Alignment Accuracy for Nanomanufacturing and Nanometrology Applications | |
| type | Journal Paper | |
| journal volume | 4 | |
| journal issue | 4 | |
| journal title | Journal of Micro and Nano-Manufacturing | |
| identifier doi | 10.1115/1.4034610 | |
| journal fristpage | 41006 | |
| journal lastpage | 041006-8 | |
| tree | Journal of Micro and Nano-Manufacturing:;2016:;volume( 004 ):;issue: 004 | |
| contenttype | Fulltext |