Application of Magnetic Polishing With Ball Nose Shaped Tool for Microchannel Shape

Abstract

In recent years, high quality and accuracy surface are needed for the microchannels such as to be used as micrototal analysis systems (microTAS) chips. On the other hand, we demonstrated that the use of smaller size machine tools is one of the effective methods to improve the environmental impact in small parts manufacturing fields. Then, in the present report, we focus on magnetic polishing for microchannels with a ball nose shaped tool, integrating end milling, and polishing processes with a desktopsized machine tool. In the case of nonmagnetic material, the method had an effective for the bottom of microchannels.