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    Ablation Dynamics of Silicon by Femtosecond Laser and the Role of Early Plasma

    Source: Journal of Manufacturing Science and Engineering:;2013:;volume( 135 ):;issue: 006::page 61015
    Author:
    Zhao, X.
    ,
    Shin, Y. C.
    DOI: 10.1115/1.4025805
    Publisher: The American Society of Mechanical Engineers (ASME)
    Abstract: In this paper, the femtosecond laser ablation of silicon is investigated by a twodimensional hydrodynamic model. The ablation depth of the silicon wafer ablated in air at different laser intensities is calculated, and the corresponding experimental measurements are carried out for validation. Two different ablation regimes have been identified by varying the laser fluence. While twophoton absorption dominates in the low fluence regime (<2 J/cm2), electron heat diffusion is a major energy transport mechanism at higher laser fluences (>2 J/cm2). The ablation efficiency first increases with the laser fluence, and reaches the peak value at the laser fluence around 8 J/cm2. It starts to drop when the laser fluence further increases, because of the early plasma absorption of the laser beam energy.
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      Ablation Dynamics of Silicon by Femtosecond Laser and the Role of Early Plasma

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    http://yetl.yabesh.ir/yetl1/handle/yetl/152427
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    contributor authorZhao, X.
    contributor authorShin, Y. C.
    date accessioned2017-05-09T01:00:41Z
    date available2017-05-09T01:00:41Z
    date issued2013
    identifier issn1087-1357
    identifier othermanu_135_06_061015.pdf
    identifier urihttp://yetl.yabesh.ir/yetl/handle/yetl/152427
    description abstractIn this paper, the femtosecond laser ablation of silicon is investigated by a twodimensional hydrodynamic model. The ablation depth of the silicon wafer ablated in air at different laser intensities is calculated, and the corresponding experimental measurements are carried out for validation. Two different ablation regimes have been identified by varying the laser fluence. While twophoton absorption dominates in the low fluence regime (<2 J/cm2), electron heat diffusion is a major energy transport mechanism at higher laser fluences (>2 J/cm2). The ablation efficiency first increases with the laser fluence, and reaches the peak value at the laser fluence around 8 J/cm2. It starts to drop when the laser fluence further increases, because of the early plasma absorption of the laser beam energy.
    publisherThe American Society of Mechanical Engineers (ASME)
    titleAblation Dynamics of Silicon by Femtosecond Laser and the Role of Early Plasma
    typeJournal Paper
    journal volume135
    journal issue6
    journal titleJournal of Manufacturing Science and Engineering
    identifier doi10.1115/1.4025805
    journal fristpage61015
    journal lastpage61015
    identifier eissn1528-8935
    treeJournal of Manufacturing Science and Engineering:;2013:;volume( 135 ):;issue: 006
    contenttypeFulltext
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    DSpace software copyright © 2002-2015  DuraSpace
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