contributor author | Zhao, X. | |
contributor author | Shin, Y. C. | |
date accessioned | 2017-05-09T01:00:41Z | |
date available | 2017-05-09T01:00:41Z | |
date issued | 2013 | |
identifier issn | 1087-1357 | |
identifier other | manu_135_06_061015.pdf | |
identifier uri | http://yetl.yabesh.ir/yetl/handle/yetl/152427 | |
description abstract | In this paper, the femtosecond laser ablation of silicon is investigated by a twodimensional hydrodynamic model. The ablation depth of the silicon wafer ablated in air at different laser intensities is calculated, and the corresponding experimental measurements are carried out for validation. Two different ablation regimes have been identified by varying the laser fluence. While twophoton absorption dominates in the low fluence regime (<2 J/cm2), electron heat diffusion is a major energy transport mechanism at higher laser fluences (>2 J/cm2). The ablation efficiency first increases with the laser fluence, and reaches the peak value at the laser fluence around 8 J/cm2. It starts to drop when the laser fluence further increases, because of the early plasma absorption of the laser beam energy. | |
publisher | The American Society of Mechanical Engineers (ASME) | |
title | Ablation Dynamics of Silicon by Femtosecond Laser and the Role of Early Plasma | |
type | Journal Paper | |
journal volume | 135 | |
journal issue | 6 | |
journal title | Journal of Manufacturing Science and Engineering | |
identifier doi | 10.1115/1.4025805 | |
journal fristpage | 61015 | |
journal lastpage | 61015 | |
identifier eissn | 1528-8935 | |
tree | Journal of Manufacturing Science and Engineering:;2013:;volume( 135 ):;issue: 006 | |
contenttype | Fulltext | |