Low Frequency Vibration Isolation Through an Active-on-Active Approach: Coupling Effects

Abstract

The extreme sensitivity of a scanning probe microscope demands an exceptional noise cancellation device that could effectively cut off a wide range of vibration noise. Existing commercial devices, although excellent in canceling high frequency noise, commonly leave low frequency vibration unattenuated. We design an add-on active stage that can function together with a standalone existing active stage. The objective is to provide a higher level of noise cancellation by lowering the overall system cut-off frequency. This study is concerned with the theoretical aspects of the coupling characteristics involved in stacking independently designed stages together to form a two-stage isolator. Whether an add-on stage would pose a stability threat to the existing stage needs to be addressed. In addition, we explore the use of coupling effects to optimize the performance of the overall system.