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    Experimental Investigations of Laser Micromachining of Nickel Using Thin Film Micro Thermocouples

    Source: Journal of Manufacturing Science and Engineering:;2008:;volume( 130 ):;issue: 002::page 21002
    Author:
    Hongseok Choi
    ,
    Xiaochun Li
    DOI: 10.1115/1.2816021
    Publisher: The American Society of Mechanical Engineers (ASME)
    Abstract: Laser-material interactions during laser micromachining are extremely complicated. In order to improve the fundamental understanding of the laser micromachining process, it is essential to investigate the complex phenomena and mechanisms of the physical processes within and close to the region of the interaction. Moreover, C-type micro thin film thermocouples with a junction size of 2×2μm2 were fabricated to increase the maximum operation temperature and spatial resolution of sensors. Surface temperature distribution around the laser spot was obtained in the range from 45μmto85μm away from the center of laser spot. The result showed that there was a steep gradient of temperature in the radial direction and a superheated area around the laser spot. Topographical characterizations of laser micromachining with various laser energy fluences were undertaken to correlate the resulting geometry changes with surface temperature measurements. Possible changes of surface chemical composition induced by the laser micromachining process, in particular, oxide formation, were also investigated around the laser spot.
    keyword(s): Thin films , Temperature , Nickel , Lasers , Micromachining , Thermocouples AND Temperature measurement ,
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      Experimental Investigations of Laser Micromachining of Nickel Using Thin Film Micro Thermocouples

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    http://yetl.yabesh.ir/yetl1/handle/yetl/138744
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    contributor authorHongseok Choi
    contributor authorXiaochun Li
    date accessioned2017-05-09T00:29:27Z
    date available2017-05-09T00:29:27Z
    date copyrightApril, 2008
    date issued2008
    identifier issn1087-1357
    identifier otherJMSEFK-28027#021002_1.pdf
    identifier urihttp://yetl.yabesh.ir/yetl/handle/yetl/138744
    description abstractLaser-material interactions during laser micromachining are extremely complicated. In order to improve the fundamental understanding of the laser micromachining process, it is essential to investigate the complex phenomena and mechanisms of the physical processes within and close to the region of the interaction. Moreover, C-type micro thin film thermocouples with a junction size of 2×2μm2 were fabricated to increase the maximum operation temperature and spatial resolution of sensors. Surface temperature distribution around the laser spot was obtained in the range from 45μmto85μm away from the center of laser spot. The result showed that there was a steep gradient of temperature in the radial direction and a superheated area around the laser spot. Topographical characterizations of laser micromachining with various laser energy fluences were undertaken to correlate the resulting geometry changes with surface temperature measurements. Possible changes of surface chemical composition induced by the laser micromachining process, in particular, oxide formation, were also investigated around the laser spot.
    publisherThe American Society of Mechanical Engineers (ASME)
    titleExperimental Investigations of Laser Micromachining of Nickel Using Thin Film Micro Thermocouples
    typeJournal Paper
    journal volume130
    journal issue2
    journal titleJournal of Manufacturing Science and Engineering
    identifier doi10.1115/1.2816021
    journal fristpage21002
    identifier eissn1528-8935
    keywordsThin films
    keywordsTemperature
    keywordsNickel
    keywordsLasers
    keywordsMicromachining
    keywordsThermocouples AND Temperature measurement
    treeJournal of Manufacturing Science and Engineering:;2008:;volume( 130 ):;issue: 002
    contenttypeFulltext
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