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contributor authorHongseok Choi
contributor authorXiaochun Li
date accessioned2017-05-09T00:29:27Z
date available2017-05-09T00:29:27Z
date copyrightApril, 2008
date issued2008
identifier issn1087-1357
identifier otherJMSEFK-28027#021002_1.pdf
identifier urihttp://yetl.yabesh.ir/yetl/handle/yetl/138744
description abstractLaser-material interactions during laser micromachining are extremely complicated. In order to improve the fundamental understanding of the laser micromachining process, it is essential to investigate the complex phenomena and mechanisms of the physical processes within and close to the region of the interaction. Moreover, C-type micro thin film thermocouples with a junction size of 2×2μm2 were fabricated to increase the maximum operation temperature and spatial resolution of sensors. Surface temperature distribution around the laser spot was obtained in the range from 45μmto85μm away from the center of laser spot. The result showed that there was a steep gradient of temperature in the radial direction and a superheated area around the laser spot. Topographical characterizations of laser micromachining with various laser energy fluences were undertaken to correlate the resulting geometry changes with surface temperature measurements. Possible changes of surface chemical composition induced by the laser micromachining process, in particular, oxide formation, were also investigated around the laser spot.
publisherThe American Society of Mechanical Engineers (ASME)
titleExperimental Investigations of Laser Micromachining of Nickel Using Thin Film Micro Thermocouples
typeJournal Paper
journal volume130
journal issue2
journal titleJournal of Manufacturing Science and Engineering
identifier doi10.1115/1.2816021
journal fristpage21002
identifier eissn1528-8935
keywordsThin films
keywordsTemperature
keywordsNickel
keywordsLasers
keywordsMicromachining
keywordsThermocouples AND Temperature measurement
treeJournal of Manufacturing Science and Engineering:;2008:;volume( 130 ):;issue: 002
contenttypeFulltext


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