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    High Precision Microscale Bending by Pulsed and CW Lasers

    Source: Journal of Manufacturing Science and Engineering:;2003:;volume( 125 ):;issue: 003::page 512
    Author:
    X. Richard Zhang
    ,
    Xianfan Xu
    DOI: 10.1115/1.1580528
    Publisher: The American Society of Mechanical Engineers (ASME)
    Abstract: This paper discusses high precision microscale laser bending and the thermomechanical phenomena involved. The use of a pulsed and a CW laser for microscale bending of ceramics, silicon, and stainless steel is demonstrated. For each laser, experiments are conducted to find out the relation between bending angles and laser operation parameters. Changes of the ceramics surface composition after laser irradiation are analyzed using an electron probe microanalyzer (EPMA). Results obtained by the pulsed and the CW laser are compared, and it is found that the CW laser produces more bending than the pulsed laser does. However, the pulsed laser causes much less surface composition change and thermomechanical damage to the targets. Numerical calculations based on the thermo-elasto-plastic theory are carried out and the results are used to explain the phenomena observed experimentally.
    keyword(s): Lasers , Accuracy , Microscale devices AND Ceramics ,
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      High Precision Microscale Bending by Pulsed and CW Lasers

    URI
    http://yetl.yabesh.ir/yetl1/handle/yetl/128698
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    contributor authorX. Richard Zhang
    contributor authorXianfan Xu
    date accessioned2017-05-09T00:10:43Z
    date available2017-05-09T00:10:43Z
    date copyrightAugust, 2003
    date issued2003
    identifier issn1087-1357
    identifier otherJMSEFK-27739#512_1.pdf
    identifier urihttp://yetl.yabesh.ir/yetl/handle/yetl/128698
    description abstractThis paper discusses high precision microscale laser bending and the thermomechanical phenomena involved. The use of a pulsed and a CW laser for microscale bending of ceramics, silicon, and stainless steel is demonstrated. For each laser, experiments are conducted to find out the relation between bending angles and laser operation parameters. Changes of the ceramics surface composition after laser irradiation are analyzed using an electron probe microanalyzer (EPMA). Results obtained by the pulsed and the CW laser are compared, and it is found that the CW laser produces more bending than the pulsed laser does. However, the pulsed laser causes much less surface composition change and thermomechanical damage to the targets. Numerical calculations based on the thermo-elasto-plastic theory are carried out and the results are used to explain the phenomena observed experimentally.
    publisherThe American Society of Mechanical Engineers (ASME)
    titleHigh Precision Microscale Bending by Pulsed and CW Lasers
    typeJournal Paper
    journal volume125
    journal issue3
    journal titleJournal of Manufacturing Science and Engineering
    identifier doi10.1115/1.1580528
    journal fristpage512
    journal lastpage518
    identifier eissn1528-8935
    keywordsLasers
    keywordsAccuracy
    keywordsMicroscale devices AND Ceramics
    treeJournal of Manufacturing Science and Engineering:;2003:;volume( 125 ):;issue: 003
    contenttypeFulltext
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    DSpace software copyright © 2002-2015  DuraSpace
    نرم افزار کتابخانه دیجیتال "دی اسپیس" فارسی شده توسط یابش برای کتابخانه های ایرانی | تماس با یابش
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