Development of High-Speed Gas Bearings for High-Power Density Microdevices

Abstract

A 4.2-mm diameter silicon rotor has been operated in a controlled and sustained manner at rotational speeds greater than 1.3 million rpm and power levels approaching 5 W. The rotor, supported by hydrostatic journal and thrust gas bearings, is driven by an air turbine. This turbomachinery/bearing test device was fabricated from single-crystal silicon wafers using micro-fabrication etching and bonding techniques. We believe this device is the first micro-machine to operate at a circumferential tip speed of over 300 meters per second, comparable to conventional macroscale turbomachinery, and necessary for achieving high levels of power density in micro-turbomachinery and micro-electrostatic/ electromagnetic devices. To achieve this level of peripheral speed, micro-fabricated rotors require stable, low-friction bearings for support. Due to the small scale of these devices as well as fabrication constraints that limit the bearing aspect ratio, the design regime is well outside that of more conventional devices. This paper focuses on bearing design and test, and rotordynamic issues for high-speed high-power micro-fabricated devices.