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    MEMS-Micropumps: A Review

    Source: Journal of Fluids Engineering:;2002:;volume( 124 ):;issue: 002::page 384
    Author:
    Nam-Trung Nguyen
    ,
    Xiaoyang Huang
    ,
    Toh Kok Chuan
    DOI: 10.1115/1.1459075
    Publisher: The American Society of Mechanical Engineers (ASME)
    Abstract: Microfluidics has emerged from the MEMS-technology as an important research field and a promising market. This paper gives an overview on one of the most important microfluidic components: the micropump. In the last decade, various micropumps have been developed. There are only a few review papers on microfluidic devices and none of them were dedicated only to micropumps. This review paper outlines systematically the pump principles and their realization with MEMS-technology. Comparisons regarding pump size, flow rate, and backpressure will help readers to decide their proper design before starting a microfluidics project. Different pump principles are compared graphically and discussed in terms of their advantages and disadvantages for particular applications.
    keyword(s): Pumps , Micropumps , Flow (Dynamics) AND Microelectromechanical systems ,
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      MEMS-Micropumps: A Review

    URI
    http://yetl.yabesh.ir/yetl1/handle/yetl/126965
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    contributor authorNam-Trung Nguyen
    contributor authorXiaoyang Huang
    contributor authorToh Kok Chuan
    date accessioned2017-05-09T00:07:48Z
    date available2017-05-09T00:07:48Z
    date copyrightJune, 2002
    date issued2002
    identifier issn0098-2202
    identifier otherJFEGA4-27173#384_1.pdf
    identifier urihttp://yetl.yabesh.ir/yetl/handle/yetl/126965
    description abstractMicrofluidics has emerged from the MEMS-technology as an important research field and a promising market. This paper gives an overview on one of the most important microfluidic components: the micropump. In the last decade, various micropumps have been developed. There are only a few review papers on microfluidic devices and none of them were dedicated only to micropumps. This review paper outlines systematically the pump principles and their realization with MEMS-technology. Comparisons regarding pump size, flow rate, and backpressure will help readers to decide their proper design before starting a microfluidics project. Different pump principles are compared graphically and discussed in terms of their advantages and disadvantages for particular applications.
    publisherThe American Society of Mechanical Engineers (ASME)
    titleMEMS-Micropumps: A Review
    typeJournal Paper
    journal volume124
    journal issue2
    journal titleJournal of Fluids Engineering
    identifier doi10.1115/1.1459075
    journal fristpage384
    journal lastpage392
    identifier eissn1528-901X
    keywordsPumps
    keywordsMicropumps
    keywordsFlow (Dynamics) AND Microelectromechanical systems
    treeJournal of Fluids Engineering:;2002:;volume( 124 ):;issue: 002
    contenttypeFulltext
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    DSpace software copyright © 2002-2015  DuraSpace
    نرم افزار کتابخانه دیجیتال "دی اسپیس" فارسی شده توسط یابش برای کتابخانه های ایرانی | تماس با یابش
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