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contributor authorNam-Trung Nguyen
contributor authorXiaoyang Huang
contributor authorToh Kok Chuan
date accessioned2017-05-09T00:07:48Z
date available2017-05-09T00:07:48Z
date copyrightJune, 2002
date issued2002
identifier issn0098-2202
identifier otherJFEGA4-27173#384_1.pdf
identifier urihttp://yetl.yabesh.ir/yetl/handle/yetl/126965
description abstractMicrofluidics has emerged from the MEMS-technology as an important research field and a promising market. This paper gives an overview on one of the most important microfluidic components: the micropump. In the last decade, various micropumps have been developed. There are only a few review papers on microfluidic devices and none of them were dedicated only to micropumps. This review paper outlines systematically the pump principles and their realization with MEMS-technology. Comparisons regarding pump size, flow rate, and backpressure will help readers to decide their proper design before starting a microfluidics project. Different pump principles are compared graphically and discussed in terms of their advantages and disadvantages for particular applications.
publisherThe American Society of Mechanical Engineers (ASME)
titleMEMS-Micropumps: A Review
typeJournal Paper
journal volume124
journal issue2
journal titleJournal of Fluids Engineering
identifier doi10.1115/1.1459075
journal fristpage384
journal lastpage392
identifier eissn1528-901X
keywordsPumps
keywordsMicropumps
keywordsFlow (Dynamics) AND Microelectromechanical systems
treeJournal of Fluids Engineering:;2002:;volume( 124 ):;issue: 002
contenttypeFulltext


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