Confined Capillary Stresses During the Initial Growth of Thin Films on Amorphous Substrates

Abstract

Changes in substrate curvature indicating the existence of compressive stress in isolated crystallites are commonly observed during the initial stages of thin film deposition of metals on glass or ceramic substrates. Following the suggestion of Abermann et al. (R. Abermann et al., 1978, Thin Solid Films, 52 , p. 215), we attribute the origin of this compressive stress to the action of capillary forces during film growth. As new atomic layers are deposited, the capillary forces acting on atoms near the surface are stored as transformation strains in the bulk of the crystallites. To test this concept, we propose three models for evaluating the capillary strains and their induced compressive stresses in a crystalline. A finite element analysis is performed to show that the model predictions agree well with experimental data.