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    Treatment of Polishing Wastewater from Semiconductor Manufacturer by Dispersed Air Flotation

    Source: Journal of Environmental Engineering:;2006:;Volume ( 132 ):;issue: 001
    Author:
    C. Y. Lien
    ,
    J. C. Liu
    DOI: 10.1061/(ASCE)0733-9372(2006)132:1(51)
    Publisher: American Society of Civil Engineers
    Abstract: Treatment of chemical mechanical polishing wastewater containing nanosized silica from semiconductor industry by dispersed air flotation was investigated. Very effective removal of particles from wastewater was found when cationic surfactant, cetyltrimethyl ammonium bromide (CTAB), was used as a collector. The flotation efficiency decreased slightly under a pH of 4.5. The zeta potential increased with a increasing concentration of CTAB, and flocculation of particles by CTAB was found. It is proposed that both the change of interface properties and the aggregation of particles contributed to flotation removal of particles. Longer reaction time and higher dosage were needed when
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      Treatment of Polishing Wastewater from Semiconductor Manufacturer by Dispersed Air Flotation

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    contributor authorC. Y. Lien
    contributor authorJ. C. Liu
    date accessioned2017-05-08T21:51:17Z
    date available2017-05-08T21:51:17Z
    date copyrightJanuary 2006
    date issued2006
    identifier other%28asce%290733-9372%282006%29132%3A1%2851%29.pdf
    identifier urihttp://yetl.yabesh.ir/yetl/handle/yetl/64342
    description abstractTreatment of chemical mechanical polishing wastewater containing nanosized silica from semiconductor industry by dispersed air flotation was investigated. Very effective removal of particles from wastewater was found when cationic surfactant, cetyltrimethyl ammonium bromide (CTAB), was used as a collector. The flotation efficiency decreased slightly under a pH of 4.5. The zeta potential increased with a increasing concentration of CTAB, and flocculation of particles by CTAB was found. It is proposed that both the change of interface properties and the aggregation of particles contributed to flotation removal of particles. Longer reaction time and higher dosage were needed when
    publisherAmerican Society of Civil Engineers
    titleTreatment of Polishing Wastewater from Semiconductor Manufacturer by Dispersed Air Flotation
    typeJournal Paper
    journal volume132
    journal issue1
    journal titleJournal of Environmental Engineering
    identifier doi10.1061/(ASCE)0733-9372(2006)132:1(51)
    treeJournal of Environmental Engineering:;2006:;Volume ( 132 ):;issue: 001
    contenttypeFulltext
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