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contributor authorZhu, Yulan
contributor authorLiu, Guodong
contributor authorLi, Yong
contributor authorTong, Hao
contributor authorCao, Peiyao
date accessioned2024-12-24T19:08:13Z
date available2024-12-24T19:08:13Z
date copyright5/8/2024 12:00:00 AM
date issued2024
identifier issn2166-0468
identifier otherjmnm_011_02_024502.pdf
identifier urihttp://yetl.yabesh.ir/yetl1/handle/yetl/4303352
description abstractStray current causes undesired material dissolution in micro-electrochemical machining (micro-ECM). The reduction of stray corrosion, caused by stray current, continues to be a major challenge for accuracy improvement. To limit the distribution of stray current, a shunt-assisted silicon electrode, with an auxiliary anode sharing stray current, is proposed in this study. The auxiliary anode is arranged outside the insulating layer of the sidewall-insulated electrode. It is proved in simulation that the auxiliary anode can help reduce the average material removal rate on the machined surface by 55% and improve processing accuracy. A fabrication process of shunt-assisted silicon electrode by bulk silicon process and thin film deposition process are presented. Microgrooves and holes are machined in ECM experiments. The angle between each side-wall and the vertical plane is less than 10 deg. The gap between the sidewall of the machined structures and electrode-outer-contour is about 30 μm±6 μm for the grooves and 45 μm±10 μm for the holes. These long‐term experiments and consistent processing results show the shunt-assisted electrode is reliable in ECM process. But due to the stray corrosion induced by DC power supply and conservative feed method, the effect of the shunt-assisted silicon electrode in inhibiting stray corrosion is not significant. In the future, a micro-ECM system with novel power supply and active control methodologies is expected to better utilize the effect of the shunt-assisted silicon electrode.
publisherThe American Society of Mechanical Engineers (ASME)
titleA Shunt-Assisted Silicon Electrode for Micro Electrochemical Machining
typeJournal Paper
journal volume11
journal issue2
journal titleJournal of Micro and Nano-Manufacturing
identifier doi10.1115/1.4065329
journal fristpage24502-1
journal lastpage24502-6
page6
treeJournal of Micro and Nano-Manufacturing:;2024:;volume( 011 ):;issue: 002
contenttypeFulltext


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