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    Experimental and Numerical Studies on Gas Flow Through Silicon Microchannels

    Source: Journal of Fluids Engineering:;2017:;volume( 139 ):;issue: 008::page 81205
    Author:
    Srinivasan, K.
    ,
    Subbarao, P. M. V.
    ,
    Kale, S. R.
    DOI: 10.1115/1.4036249
    Publisher: The American Society of Mechanical Engineers (ASME)
    Abstract: The present work investigates the extension of Navier–Stokes equations from slip-to-transition regimes with higher-order slip boundary condition. To achieve this, a slip model based on the second-order slip boundary condition was derived and a special procedure was developed to simulate slip models using FLUENT®. The boundary profile for both top and bottom walls was solved for each pressure ratio by the customized user-defined function and then passed to the FLUENT® solver. The flow characteristics in microchannels of various aspect ratios (a = H/W = 0.002, 0.01, and 0.1) by generating accurate and high-resolution experimental data along with the computational validation was studied. For that, microchannel system was fabricated in silicon wafers with controlled surface structure and each system has several identical microchannels of same dimensions in parallel and the processed wafer was bonded with a plane wafer. The increased flow rate reduced uncertainty substantially. The experiments were performed up to maximum outlet Knudsen number of 1.01 with nitrogen and the second-order slip coefficients were found to be C1 = 1.119–1.288 (TMAC = 0.944–0.874) and C2 = 0.34.
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      Experimental and Numerical Studies on Gas Flow Through Silicon Microchannels

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    http://yetl.yabesh.ir/yetl1/handle/yetl/4234054
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    contributor authorSrinivasan, K.
    contributor authorSubbarao, P. M. V.
    contributor authorKale, S. R.
    date accessioned2017-11-25T07:16:31Z
    date available2017-11-25T07:16:31Z
    date copyright2017/5/6
    date issued2017
    identifier issn0098-2202
    identifier otherfe_139_08_081205.pdf
    identifier urihttp://138.201.223.254:8080/yetl1/handle/yetl/4234054
    description abstractThe present work investigates the extension of Navier–Stokes equations from slip-to-transition regimes with higher-order slip boundary condition. To achieve this, a slip model based on the second-order slip boundary condition was derived and a special procedure was developed to simulate slip models using FLUENT®. The boundary profile for both top and bottom walls was solved for each pressure ratio by the customized user-defined function and then passed to the FLUENT® solver. The flow characteristics in microchannels of various aspect ratios (a = H/W = 0.002, 0.01, and 0.1) by generating accurate and high-resolution experimental data along with the computational validation was studied. For that, microchannel system was fabricated in silicon wafers with controlled surface structure and each system has several identical microchannels of same dimensions in parallel and the processed wafer was bonded with a plane wafer. The increased flow rate reduced uncertainty substantially. The experiments were performed up to maximum outlet Knudsen number of 1.01 with nitrogen and the second-order slip coefficients were found to be C1 = 1.119–1.288 (TMAC = 0.944–0.874) and C2 = 0.34.
    publisherThe American Society of Mechanical Engineers (ASME)
    titleExperimental and Numerical Studies on Gas Flow Through Silicon Microchannels
    typeJournal Paper
    journal volume139
    journal issue8
    journal titleJournal of Fluids Engineering
    identifier doi10.1115/1.4036249
    journal fristpage81205
    journal lastpage081205-12
    treeJournal of Fluids Engineering:;2017:;volume( 139 ):;issue: 008
    contenttypeFulltext
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    DSpace software copyright © 2002-2015  DuraSpace
    نرم افزار کتابخانه دیجیتال "دی اسپیس" فارسی شده توسط یابش برای کتابخانه های ایرانی | تماس با یابش
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