Theoretical and Experimental Study of Metallic Dot Agglomeration Induced by Thermal Dewetting

Abstract

The authors previously developed a new fabrication method for a metal nanodot array, by combination of nanogroove grid patterning and thermal dewetting of metal deposited on a substrate. However, a comprehensive understanding of the thermal dewetting mechanism is necessary to improve the quality and control the variation of the metallic nanodot array. In this study, thermal dewettinginduced nanodot agglomeration mechanism is studied from a theoretical point of view. An analytical model is proposed, based on the total free energy of a dot and substrate system. The theoretical minimum and natural dot sizes show the same trend with an increase of contact angle. The theoretical model is validated by the experimental results.