Fringing Electrostatic Field Actuation of Microplates for Open Air Environment Sensing

Abstract

In the present study, we tested the feasibility of actuation of microplates by fringing electrostatic fields, i.e., field lines between plates and the sidewalls supporting them. Unlike the common closegap actuation mechanism usually used in these kinds of devices, we present an alternative operational principle based on an electrostatic fringe field for the actuation of micro electromechanical (MEMS) plates, which is especially beneficial for open air environment operation. In order to validate the actuation principle, a circular MEMS plate was considered and an analytical model was built. The electrostatic force applied to the plate was extracted from a solution of a steady boundary value problem of a cylinder and was validated numerically using finite element simulation. This was followed by a solution of the plate governing equation of motion using an expansion theorem. Devices of two different geometries were fabricated and operated. Actuation of the plates by means of the fringing field was demonstrated experimentally. The proposed architecture and actuation principle is advantageous and overcomes many of the difficulties encountered in microplates electrostatically actuated by a closegap electrode. Due to the absence of a small gap, the device is not prone to pullin instability and stiction and is not subjected to squeezefilm damping. Moreover, since the actuation is separated from the front side of the device, open air contaminations, such as humidity or dust, cannot cause operational failure. In addition, the device is especially beneficial for mass sensing in an open environment, as well as flow senors where a flushmounted smooth surface is important.