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contributor authorGandhi, Prasanna
contributor authorBhole, Kiran
date accessioned2017-05-09T01:01:49Z
date available2017-05-09T01:01:49Z
date issued2013
identifier issn2166-0468
identifier otherjmnm_001_04_041002.pdf
identifier urihttp://yetl.yabesh.ir/yetl/handle/yetl/152879
description abstractVarious ways of fabricating a threedimensional (3D) component in a singlelayer exposure using spatial variation of exposure dose have been presented in the literature. While some of them are based on dynamic mask process, more recently, a process based on varying intensity of a scanning Gaussian laser beam termed as “bulk lithographyâ€‌ has been proposed. In bulk lithography, the entire varying depth 3D microstructure gets fabricated because of spatial variation of intensity of laser imposed at every point in single layer scan. For the bulk lithography process, this paper first presents experimental characterization of unconstrained depth photopolymerization of resin upon exposure to Gaussian laser beam. Experimental characterization carried out for two resins systems: namely 1,6 hexane dioldiacrylate (HDDA) and trimethylolpropane triacrylate (TMPTA), over relatively wider range of Ar+ laser exposure dose and time, show behavior well beyond Beer–Lambert law. A unified empirical model is proposed to represent the nondimensional depth variation with respect to the time and energy of exposure for both resins. Finally, using these models, successful fabrication of several microstructures including microFresnel lens, textured curved surface, otherwise difficult or impossible to fabricate, is demonstrated. Several advantages of the bulk lithography as compared to other similar processes in the literature are highlighted.
publisherThe American Society of Mechanical Engineers (ASME)
titleCharacterization of “Bulk Lithographyâ€‌ Process for Fabrication of Three Dimensional Microstructures
typeJournal Paper
journal volume1
journal issue4
journal titleJournal of Micro and Nano
identifier doi10.1115/1.4025461
journal fristpage41002
journal lastpage41002
identifier eissn1932-619X
treeJournal of Micro and Nano-Manufacturing:;2013:;volume( 001 ):;issue: 004
contenttypeFulltext


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