| contributor author | Dayal, Govind | |
| contributor author | Nadeem Akhtar, Syed | |
| contributor author | Ramakrishna, S. Anantha | |
| contributor author | Ramkumar, J. | |
| date accessioned | 2017-05-09T01:01:48Z | |
| date available | 2017-05-09T01:01:48Z | |
| date issued | 2013 | |
| identifier issn | 2166-0468 | |
| identifier other | jmnm_001_03_031002.pdf | |
| identifier uri | http://yetl.yabesh.ir/yetl/handle/yetl/152871 | |
| description abstract | Excimer laser micromachining using binary mask projection has been investigated for rapid patterning of single micrometer features over large areas of various substrates. Simple limit for depth of focus that determines the depth to width aspect ratios is given and verified for different materials. Binary mask projection technique is found to conformally reproduce the mask features from the millimetre to the micrometer scale under proper focusing conditions. Large arrays of 1 خ¼m and 15 خ¼m holes on Kapton are made with high resolution and uniform periodicity. Material removal rate (MRR) for the laser machining of these holes are examined and the machining efficiency for these are found to have different dependence on the fluence. A saturation of holedepth with increasing number of pulses is obtained. | |
| publisher | The American Society of Mechanical Engineers (ASME) | |
| title | Excimer Laser Micromachining Using Binary Mask Projection for Large Area Patterning With Single Micrometer Features | |
| type | Journal Paper | |
| journal volume | 1 | |
| journal issue | 3 | |
| journal title | Journal of Micro and Nano | |
| identifier doi | 10.1115/1.4024880 | |
| journal fristpage | 31002 | |
| journal lastpage | 31002 | |
| identifier eissn | 1932-619X | |
| tree | Journal of Micro and Nano-Manufacturing:;2013:;volume( 001 ):;issue: 003 | |
| contenttype | Fulltext | |
