Exact Constraint Design of a Two Degree of Freedom Flexure Based Mechanism1

Abstract

We present the exact constraint design of a two degrees of freedom crossflexurebased stage that combines a large workspace to footprint ratio with high vibration mode frequencies. To maximize unwanted vibration mode frequencies the mechanism is an assembly of optimized parts. To ensure a deterministic behavior the assembled mechanism is made exactly constrained. We analyze the kinematics of the mechanism using three methods; Grأ¼blers criterion, opening the kinematic loops, and with a multibody singular value decomposition method. Nine releaseflexures are implemented to obtain an exact constraint design. Measurements of the actuation force and natural frequency show no bifurcation, and load stiffening is minimized, even though there are various errors causing nonlinearity. Misalignment of the exact constraint designs does not lead to large stress, it does however decrease the support stiffness significantly. We conclude that designing an assembled mechanism in an exactly constrained manner leads to predictable stiffnesses and modal frequencies.