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    Design, Fabrication, and Characterization of Metal Embedded Microphotonic Sensors

    Source: Journal of Manufacturing Science and Engineering:;2008:;volume( 130 ):;issue: 003::page 31104
    Author:
    Xugang Zhang
    ,
    Hongrui Jiang
    ,
    Xiaochun Li
    DOI: 10.1115/1.2917356
    Publisher: The American Society of Mechanical Engineers (ASME)
    Abstract: Recent developments in integrated microphotonics have led to unprecedented potential toward robust sensor enhancements for manufacturing systems. These micron-sized subwavelength structured photonic sensors could allow critical thermomechanical phenomena in manufacturing processes to be monitored while offering immunity to electromagnetic interference, resistance to hostile environments, multiplexing capabilities, and high rates of data collection. To implement these novel sensors into real manufacturing processes, the microphotonic sensors can be embedded at critical locations in metallic structures, which are heavily used in hostile manufacturing environments. This paper presents the study of design, fabrication, and characterization of integrated microring sensors. Various thin film optical materials were studied and single ring resonators were designed. A new approach to fabricate metal embedded microring sensors was developed. Metal embedded optical microring temperature sensors were characterized. The Q factor of the metal embedded microring sensors was measured to be around 2000, while the free spectral range was about 5.2nm. The temperature sensitivity of the metal embedded microring sensor was 24.2pm∕°C.
    keyword(s): Metals , Sensors , Manufacturing , Design AND Temperature ,
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      Design, Fabrication, and Characterization of Metal Embedded Microphotonic Sensors

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    http://yetl.yabesh.ir/yetl1/handle/yetl/138718
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    contributor authorXugang Zhang
    contributor authorHongrui Jiang
    contributor authorXiaochun Li
    date accessioned2017-05-09T00:29:25Z
    date available2017-05-09T00:29:25Z
    date copyrightJune, 2008
    date issued2008
    identifier issn1087-1357
    identifier otherJMSEFK-28028#031104_1.pdf
    identifier urihttp://yetl.yabesh.ir/yetl/handle/yetl/138718
    description abstractRecent developments in integrated microphotonics have led to unprecedented potential toward robust sensor enhancements for manufacturing systems. These micron-sized subwavelength structured photonic sensors could allow critical thermomechanical phenomena in manufacturing processes to be monitored while offering immunity to electromagnetic interference, resistance to hostile environments, multiplexing capabilities, and high rates of data collection. To implement these novel sensors into real manufacturing processes, the microphotonic sensors can be embedded at critical locations in metallic structures, which are heavily used in hostile manufacturing environments. This paper presents the study of design, fabrication, and characterization of integrated microring sensors. Various thin film optical materials were studied and single ring resonators were designed. A new approach to fabricate metal embedded microring sensors was developed. Metal embedded optical microring temperature sensors were characterized. The Q factor of the metal embedded microring sensors was measured to be around 2000, while the free spectral range was about 5.2nm. The temperature sensitivity of the metal embedded microring sensor was 24.2pm∕°C.
    publisherThe American Society of Mechanical Engineers (ASME)
    titleDesign, Fabrication, and Characterization of Metal Embedded Microphotonic Sensors
    typeJournal Paper
    journal volume130
    journal issue3
    journal titleJournal of Manufacturing Science and Engineering
    identifier doi10.1115/1.2917356
    journal fristpage31104
    identifier eissn1528-8935
    keywordsMetals
    keywordsSensors
    keywordsManufacturing
    keywordsDesign AND Temperature
    treeJournal of Manufacturing Science and Engineering:;2008:;volume( 130 ):;issue: 003
    contenttypeFulltext
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