Modeling and Design of an Optically Powered Microactuator for a Microfluidic Dispenser

Abstract

This paper presents systematic modeling and design of an optically powered piezoelectric microactuator for driving a microfluidic dispenser that could find a potential application in a retinal prosthesis. The first part of the paper treats a microactuator system comprised of a micron-scale piezoelectric unimorph integrated with a miniaturized solid-state solar cell. The microactuator design is tailored for driving a microfluidic dispenser to dispense a stored liquid chemical through its micron-sized outlet ports at a rate of about 1pl∕s when the integrated solar cell is irradiated by light at a power density of 3W∕m2, corresponding to the requirements of the potential application. The microactuator system design is accomplished by first obtaining analytical models for the solar cell characteristic behavior and the microactuator displacements and then combining them to obtain the key dimensions of the microactuator through a design optimization. An analysis of the performance characteristics of the microactuator and a finite element analysis validating the analytical model for the microactuator’s displacements and the peak stresses under the operating loads are presented. The latter part of the paper presents a design of a microfluidic dispenser utilizing the optically powered microactuator and satisfying the desired input/output requirements. An analytical model integrating various energy domains involved in the system, viz. opto-electrical, piezoelectric, mechanical and hydraulic, is derived for the liquid flow through the dispenser’s micron-sized outlet ports. Finally, the energetic feasibility of the microactuator design obtained for the specified input and output criteria is also discussed.