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    A Cyclic Microbend Study on LIGA Ni Microelectromechanical Systems Thin Films

    Source: Journal of Engineering Materials and Technology:;2005:;volume( 127 ):;issue: 001::page 16
    Author:
    J. Lou
    ,
    P. Shrotriya
    ,
    W. O. Soboyejo
    DOI: 10.1115/1.1836767
    Publisher: The American Society of Mechanical Engineers (ASME)
    Abstract: This paper presents the results of recent studies of cyclic microbend experiments and their consequences for plasticity length-scale phenomena in LIGA Ni microelectromechanical systems (MEMS) thin films. The strain–life fatigue behavior of LIGA Ni thin films is studied by performing fully reversed cyclic microbend experiments that provide insights into cyclic stress/strain evolution and cyclic failure phenomena. The effects of cyclic deformation on the plasticity length-scale parameters are also considered within the context of strain gradient plasticity theories. The implications of the results are then discussed for the analysis of plasticity and cyclic deformation in MEMS structures and other microscale systems.
    keyword(s): Thin films , Plasticity , Deformation , Fatigue , Stress , Microelectromechanical systems , Gradients , Failure AND Cycles ,
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      A Cyclic Microbend Study on LIGA Ni Microelectromechanical Systems Thin Films

    URI
    http://yetl.yabesh.ir/yetl1/handle/yetl/131905
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    contributor authorJ. Lou
    contributor authorP. Shrotriya
    contributor authorW. O. Soboyejo
    date accessioned2017-05-09T00:16:20Z
    date available2017-05-09T00:16:20Z
    date copyrightJanuary, 2005
    date issued2005
    identifier issn0094-4289
    identifier otherJEMTA8-27065#16_1.pdf
    identifier urihttp://yetl.yabesh.ir/yetl/handle/yetl/131905
    description abstractThis paper presents the results of recent studies of cyclic microbend experiments and their consequences for plasticity length-scale phenomena in LIGA Ni microelectromechanical systems (MEMS) thin films. The strain–life fatigue behavior of LIGA Ni thin films is studied by performing fully reversed cyclic microbend experiments that provide insights into cyclic stress/strain evolution and cyclic failure phenomena. The effects of cyclic deformation on the plasticity length-scale parameters are also considered within the context of strain gradient plasticity theories. The implications of the results are then discussed for the analysis of plasticity and cyclic deformation in MEMS structures and other microscale systems.
    publisherThe American Society of Mechanical Engineers (ASME)
    titleA Cyclic Microbend Study on LIGA Ni Microelectromechanical Systems Thin Films
    typeJournal Paper
    journal volume127
    journal issue1
    journal titleJournal of Engineering Materials and Technology
    identifier doi10.1115/1.1836767
    journal fristpage16
    journal lastpage22
    identifier eissn1528-8889
    keywordsThin films
    keywordsPlasticity
    keywordsDeformation
    keywordsFatigue
    keywordsStress
    keywordsMicroelectromechanical systems
    keywordsGradients
    keywordsFailure AND Cycles
    treeJournal of Engineering Materials and Technology:;2005:;volume( 127 ):;issue: 001
    contenttypeFulltext
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