Study of 3D Micro-Ultrasonic MachiningSource: Journal of Manufacturing Science and Engineering:;2004:;volume( 126 ):;issue: 004::page 727DOI: 10.1115/1.1813482Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: Many manufacturing processes, such as lithography, etching, laser, electrical discharge machining (EDM), and electrochemical machining (ECM), are being applied to produce the meso- and microscale parts and products. Materials such as silicon, glass, quartz crystal, and ceramics are being increasingly used in microelectromechanical system (MEMS) devices. Ultrasonic machining (USM) offers an attractive alternative to machine some of the hard and brittle materials. However, the tool wear in micro-ultrasonic machining adversely affects the machining accuracy. Therefore, it is necessary to account for and to compensate the tool wear during machining. This paper reports the feasibility of applying the uniform wear method developed for micro electrical discharge machining and its integration with CAD/CAM to microultrasonic vibration process for generating accurate three-dimensional (3D) microcavities. Experimental results show that the tool shape remains unchanged and the tool wear has been compensated.
keyword(s): Wear , Machining , Shapes , Vibration , Computer-aided design AND Machinery ,
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contributor author | Z. Y. Yu | |
contributor author | K. P. Rajurkar | |
contributor author | A. Tandon | |
date accessioned | 2017-05-09T00:13:34Z | |
date available | 2017-05-09T00:13:34Z | |
date copyright | November, 2004 | |
date issued | 2004 | |
identifier issn | 1087-1357 | |
identifier other | JMSEFK-27832#727_1.pdf | |
identifier uri | http://yetl.yabesh.ir/yetl/handle/yetl/130337 | |
description abstract | Many manufacturing processes, such as lithography, etching, laser, electrical discharge machining (EDM), and electrochemical machining (ECM), are being applied to produce the meso- and microscale parts and products. Materials such as silicon, glass, quartz crystal, and ceramics are being increasingly used in microelectromechanical system (MEMS) devices. Ultrasonic machining (USM) offers an attractive alternative to machine some of the hard and brittle materials. However, the tool wear in micro-ultrasonic machining adversely affects the machining accuracy. Therefore, it is necessary to account for and to compensate the tool wear during machining. This paper reports the feasibility of applying the uniform wear method developed for micro electrical discharge machining and its integration with CAD/CAM to microultrasonic vibration process for generating accurate three-dimensional (3D) microcavities. Experimental results show that the tool shape remains unchanged and the tool wear has been compensated. | |
publisher | The American Society of Mechanical Engineers (ASME) | |
title | Study of 3D Micro-Ultrasonic Machining | |
type | Journal Paper | |
journal volume | 126 | |
journal issue | 4 | |
journal title | Journal of Manufacturing Science and Engineering | |
identifier doi | 10.1115/1.1813482 | |
journal fristpage | 727 | |
journal lastpage | 732 | |
identifier eissn | 1528-8935 | |
keywords | Wear | |
keywords | Machining | |
keywords | Shapes | |
keywords | Vibration | |
keywords | Computer-aided design AND Machinery | |
tree | Journal of Manufacturing Science and Engineering:;2004:;volume( 126 ):;issue: 004 | |
contenttype | Fulltext |