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    Microscale pumping technologies for microchannel cooling systems

    Source: Applied Mechanics Reviews:;2004:;volume( 057 ):;issue: 003::page 191
    Author:
    Vishal Singhal
    ,
    Suresh V Garimella
    ,
    Arvind Raman
    DOI: 10.1115/1.1695401
    Publisher: The American Society of Mechanical Engineers (ASME)
    Abstract: A review of the state of the art in micropumping technologies for driving fluid through microchannels is presented with a particular emphasis on small-scale cooling applications. An extensive variety of micropumping techniques developed over the past fifteen years in the literature is reviewed. The physical principles, engineering limitations, and advantages of approximately twenty different kinds of micropumps are reviewed. The available micropumping techniques are compared quantitatively, primarily in terms of the maximum achievable flow rate per unit cross-sectional area of the microchannel and the maximum achievable back pressure. A concise table is developed to facilitate the convenient comparison of the micropumps based on different criteria including their miniaturization potential, size (in-plane and out-of-plane), actuation voltage and power required per unit flow rate, ease and cost of fabrication, minimum and maximum frequency of operation, and suitability for electronics cooling. Some important performance characteristics of the micropumps, which are likely to be decisive for specific applications, are also discussed. The current state of the art in micropump design and fabrication is also comprehensively reviewed. There are 171 references cited in this review article.
    keyword(s): Pressure , Flow (Dynamics) , Fluids , Pumps , Micropumps , Diaphragms (Structural) , Silicon , Microchannels , Valves , Micromachining , Channels (Hydraulic engineering) , Electric potential , Design AND Membranes ,
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      Microscale pumping technologies for microchannel cooling systems

    URI
    http://yetl.yabesh.ir/yetl1/handle/yetl/129406
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    contributor authorVishal Singhal
    contributor authorSuresh V Garimella
    contributor authorArvind Raman
    date accessioned2017-05-09T00:11:56Z
    date available2017-05-09T00:11:56Z
    date copyrightMay, 2004
    date issued2004
    identifier issn0003-6900
    identifier otherAMREAD-25842#191_1.pdf
    identifier urihttp://yetl.yabesh.ir/yetl/handle/yetl/129406
    description abstractA review of the state of the art in micropumping technologies for driving fluid through microchannels is presented with a particular emphasis on small-scale cooling applications. An extensive variety of micropumping techniques developed over the past fifteen years in the literature is reviewed. The physical principles, engineering limitations, and advantages of approximately twenty different kinds of micropumps are reviewed. The available micropumping techniques are compared quantitatively, primarily in terms of the maximum achievable flow rate per unit cross-sectional area of the microchannel and the maximum achievable back pressure. A concise table is developed to facilitate the convenient comparison of the micropumps based on different criteria including their miniaturization potential, size (in-plane and out-of-plane), actuation voltage and power required per unit flow rate, ease and cost of fabrication, minimum and maximum frequency of operation, and suitability for electronics cooling. Some important performance characteristics of the micropumps, which are likely to be decisive for specific applications, are also discussed. The current state of the art in micropump design and fabrication is also comprehensively reviewed. There are 171 references cited in this review article.
    publisherThe American Society of Mechanical Engineers (ASME)
    titleMicroscale pumping technologies for microchannel cooling systems
    typeJournal Paper
    journal volume57
    journal issue3
    journal titleApplied Mechanics Reviews
    identifier doi10.1115/1.1695401
    journal fristpage191
    journal lastpage221
    identifier eissn0003-6900
    keywordsPressure
    keywordsFlow (Dynamics)
    keywordsFluids
    keywordsPumps
    keywordsMicropumps
    keywordsDiaphragms (Structural)
    keywordsSilicon
    keywordsMicrochannels
    keywordsValves
    keywordsMicromachining
    keywordsChannels (Hydraulic engineering)
    keywordsElectric potential
    keywordsDesign AND Membranes
    treeApplied Mechanics Reviews:;2004:;volume( 057 ):;issue: 003
    contenttypeFulltext
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