Microscale pumping technologies for microchannel cooling systemsSource: Applied Mechanics Reviews:;2004:;volume( 057 ):;issue: 003::page 191DOI: 10.1115/1.1695401Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: A review of the state of the art in micropumping technologies for driving fluid through microchannels is presented with a particular emphasis on small-scale cooling applications. An extensive variety of micropumping techniques developed over the past fifteen years in the literature is reviewed. The physical principles, engineering limitations, and advantages of approximately twenty different kinds of micropumps are reviewed. The available micropumping techniques are compared quantitatively, primarily in terms of the maximum achievable flow rate per unit cross-sectional area of the microchannel and the maximum achievable back pressure. A concise table is developed to facilitate the convenient comparison of the micropumps based on different criteria including their miniaturization potential, size (in-plane and out-of-plane), actuation voltage and power required per unit flow rate, ease and cost of fabrication, minimum and maximum frequency of operation, and suitability for electronics cooling. Some important performance characteristics of the micropumps, which are likely to be decisive for specific applications, are also discussed. The current state of the art in micropump design and fabrication is also comprehensively reviewed. There are 171 references cited in this review article.
keyword(s): Pressure , Flow (Dynamics) , Fluids , Pumps , Micropumps , Diaphragms (Structural) , Silicon , Microchannels , Valves , Micromachining , Channels (Hydraulic engineering) , Electric potential , Design AND Membranes ,
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contributor author | Vishal Singhal | |
contributor author | Suresh V Garimella | |
contributor author | Arvind Raman | |
date accessioned | 2017-05-09T00:11:56Z | |
date available | 2017-05-09T00:11:56Z | |
date copyright | May, 2004 | |
date issued | 2004 | |
identifier issn | 0003-6900 | |
identifier other | AMREAD-25842#191_1.pdf | |
identifier uri | http://yetl.yabesh.ir/yetl/handle/yetl/129406 | |
description abstract | A review of the state of the art in micropumping technologies for driving fluid through microchannels is presented with a particular emphasis on small-scale cooling applications. An extensive variety of micropumping techniques developed over the past fifteen years in the literature is reviewed. The physical principles, engineering limitations, and advantages of approximately twenty different kinds of micropumps are reviewed. The available micropumping techniques are compared quantitatively, primarily in terms of the maximum achievable flow rate per unit cross-sectional area of the microchannel and the maximum achievable back pressure. A concise table is developed to facilitate the convenient comparison of the micropumps based on different criteria including their miniaturization potential, size (in-plane and out-of-plane), actuation voltage and power required per unit flow rate, ease and cost of fabrication, minimum and maximum frequency of operation, and suitability for electronics cooling. Some important performance characteristics of the micropumps, which are likely to be decisive for specific applications, are also discussed. The current state of the art in micropump design and fabrication is also comprehensively reviewed. There are 171 references cited in this review article. | |
publisher | The American Society of Mechanical Engineers (ASME) | |
title | Microscale pumping technologies for microchannel cooling systems | |
type | Journal Paper | |
journal volume | 57 | |
journal issue | 3 | |
journal title | Applied Mechanics Reviews | |
identifier doi | 10.1115/1.1695401 | |
journal fristpage | 191 | |
journal lastpage | 221 | |
identifier eissn | 0003-6900 | |
keywords | Pressure | |
keywords | Flow (Dynamics) | |
keywords | Fluids | |
keywords | Pumps | |
keywords | Micropumps | |
keywords | Diaphragms (Structural) | |
keywords | Silicon | |
keywords | Microchannels | |
keywords | Valves | |
keywords | Micromachining | |
keywords | Channels (Hydraulic engineering) | |
keywords | Electric potential | |
keywords | Design AND Membranes | |
tree | Applied Mechanics Reviews:;2004:;volume( 057 ):;issue: 003 | |
contenttype | Fulltext |