On the Modal Testing of Microstructures: Its Theoretical Approach and Experimental Setup

Abstract

Small and lightweight structures have very high natural frequencies and small elastic displacement compared to ordinary structures. Due to limited excitation bandwidth and relatively large size of pick up devices, conventional modal testing facilities are not feasible for testing MEMS structures. A modal testing system based on the base excitation principle was developed in this research. In the meantime, the associated mathematical model for frequency response functions was derived as well. Testing structures are mounted on a rigid platform that can move essentially with only one translational degree of freedom. An electric discharge pulse strikes the platform to provide a very wide band excitation. Laser Doppler vibrometers are used to pick up both input and output signals. Since these signals are picked up without contacting structures, the structural dynamic characteristics remain intact without any distortion. With this system, modal parameters of a miniature structure can be extracted, and the receptance functions are synthesized successfully.