On the Limit of Surface Integrity of Alumina by Ductile-Mode Grinding

Abstract

This paper investigates both experimentally and theoretically the subsurface damage in alumina by ductile-mode griding. It found that the distribution of the fractured area on a ground mirror surface, with the Rms roughness in the range from 30 nm to 90 nm, depends on not only the grinding conditions but also the pores in the bulk material. Surface pit formation is the result of interaction of abrasive grains of the grinding wheel with pores. Thus the surface quality achievable by ductile-mode grinding is limited by the initial microstructure of a material. The investigation shows that median and radial cracks do not appear and hence are not the cause of fracture as usually thought. [S0094-4289(00)02001-6]