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    A Plastic Stress Analysis of Cylindrical Wafers Under Elastically Deformable Compression Plates

    Source: Journal of Fluids Engineering:;1967:;volume( 089 ):;issue: 003::page 541
    Author:
    R. L. Davis
    ,
    J. W. Jackson
    DOI: 10.1115/1.3609655
    Publisher: The American Society of Mechanical Engineers (ASME)
    Abstract: This paper represents an analysis of the pressure distribution occurring in axially loaded cylindrical wafers with, and without, elastic radial constraints. The purpose of this report is to demonstrate the resulting stress patterns that occur in short compression specimens frequently used in determining material properties, and in the opposed-anvil, or Bridgman-type, high-pressure cells. The influence of radial constraints, material strain hardening, wafer diameter-to-height ratio, anvil or plate deflection, and the wafer-anvil interface friction on the resulting stress distributions have been examined. The integrated normal stress distribution across the specimen surface has been verified experimentally via numerous tests in which each of the subject parameters listed above was varied.
    keyword(s): Semiconductor wafers , Plates (structures) , Compression , Stress analysis (Engineering) , Stress , High pressure (Physics) , Pressure , Friction , Deflection , Work hardening , Stress concentration AND Materials properties ,
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      A Plastic Stress Analysis of Cylindrical Wafers Under Elastically Deformable Compression Plates

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    http://yetl.yabesh.ir/yetl1/handle/yetl/119756
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    contributor authorR. L. Davis
    contributor authorJ. W. Jackson
    date accessioned2017-05-08T23:55:21Z
    date available2017-05-08T23:55:21Z
    date copyrightSeptember, 1967
    date issued1967
    identifier issn0098-2202
    identifier otherJFEGA4-27300#541_1.pdf
    identifier urihttp://yetl.yabesh.ir/yetl/handle/yetl/119756
    description abstractThis paper represents an analysis of the pressure distribution occurring in axially loaded cylindrical wafers with, and without, elastic radial constraints. The purpose of this report is to demonstrate the resulting stress patterns that occur in short compression specimens frequently used in determining material properties, and in the opposed-anvil, or Bridgman-type, high-pressure cells. The influence of radial constraints, material strain hardening, wafer diameter-to-height ratio, anvil or plate deflection, and the wafer-anvil interface friction on the resulting stress distributions have been examined. The integrated normal stress distribution across the specimen surface has been verified experimentally via numerous tests in which each of the subject parameters listed above was varied.
    publisherThe American Society of Mechanical Engineers (ASME)
    titleA Plastic Stress Analysis of Cylindrical Wafers Under Elastically Deformable Compression Plates
    typeJournal Paper
    journal volume89
    journal issue3
    journal titleJournal of Fluids Engineering
    identifier doi10.1115/1.3609655
    journal fristpage541
    journal lastpage550
    identifier eissn1528-901X
    keywordsSemiconductor wafers
    keywordsPlates (structures)
    keywordsCompression
    keywordsStress analysis (Engineering)
    keywordsStress
    keywordsHigh pressure (Physics)
    keywordsPressure
    keywordsFriction
    keywordsDeflection
    keywordsWork hardening
    keywordsStress concentration AND Materials properties
    treeJournal of Fluids Engineering:;1967:;volume( 089 ):;issue: 003
    contenttypeFulltext
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