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    A Scanning Electron Microscope With Two Secondary Electron Detectors and Its Application to the Surface Topography Measurements of Magnetic Media

    Source: Journal of Tribology:;1992:;volume( 114 ):;issue: 002::page 274
    Author:
    K. Tanaka
    ,
    J. Matsuda
    ,
    M. Hotta
    ,
    K. Nishimori
    ,
    K. Maeda
    DOI: 10.1115/1.2920884
    Publisher: The American Society of Mechanical Engineers (ASME)
    Abstract: A scanning electron microscope (SEM) with two secondary electron detectors is applied for the surface topography measurement of magnetic media. The principle of gradient determination of the SEM is based on a relation that the difference in the square signals between the two detectors is linearly proportional to surface gradient. The great advantage of the instrument is the capability of relocation for profiling. It is extremely useful for the examination of wear process at a fixed position in a sequential manner during wear testing. This is demonstrated by two sample data of measurement on thin film rigid disks.
    keyword(s): Electrons , Measurement , Sensors , Scanning electron microscopes , Gradients , Signals , Wear testing , Thin films , Wear , Instrumentation AND Disks ,
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      A Scanning Electron Microscope With Two Secondary Electron Detectors and Its Application to the Surface Topography Measurements of Magnetic Media

    URI
    http://yetl.yabesh.ir/yetl1/handle/yetl/110972
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    contributor authorK. Tanaka
    contributor authorJ. Matsuda
    contributor authorM. Hotta
    contributor authorK. Nishimori
    contributor authorK. Maeda
    date accessioned2017-05-08T23:39:44Z
    date available2017-05-08T23:39:44Z
    date copyrightApril, 1992
    date issued1992
    identifier issn0742-4787
    identifier otherJOTRE9-28495#274_1.pdf
    identifier urihttp://yetl.yabesh.ir/yetl/handle/yetl/110972
    description abstractA scanning electron microscope (SEM) with two secondary electron detectors is applied for the surface topography measurement of magnetic media. The principle of gradient determination of the SEM is based on a relation that the difference in the square signals between the two detectors is linearly proportional to surface gradient. The great advantage of the instrument is the capability of relocation for profiling. It is extremely useful for the examination of wear process at a fixed position in a sequential manner during wear testing. This is demonstrated by two sample data of measurement on thin film rigid disks.
    publisherThe American Society of Mechanical Engineers (ASME)
    titleA Scanning Electron Microscope With Two Secondary Electron Detectors and Its Application to the Surface Topography Measurements of Magnetic Media
    typeJournal Paper
    journal volume114
    journal issue2
    journal titleJournal of Tribology
    identifier doi10.1115/1.2920884
    journal fristpage274
    journal lastpage279
    identifier eissn1528-8897
    keywordsElectrons
    keywordsMeasurement
    keywordsSensors
    keywordsScanning electron microscopes
    keywordsGradients
    keywordsSignals
    keywordsWear testing
    keywordsThin films
    keywordsWear
    keywordsInstrumentation AND Disks
    treeJournal of Tribology:;1992:;volume( 114 ):;issue: 002
    contenttypeFulltext
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    DSpace software copyright © 2002-2015  DuraSpace
    نرم افزار کتابخانه دیجیتال "دی اسپیس" فارسی شده توسط یابش برای کتابخانه های ایرانی | تماس با یابش
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