Abstract: This paper reports on roller skew in tapered roller bearings. The roller skewing of a tapered roller bearing is experimentally measured with a specialized capacitance probe (Kelvin contact ...

Abstract: This paper reports the results of a model for predicting the development of subambient pressures during the polishing of flat hard substrates by sliding against a compliant pad in the presence ...

Abstract: This paper reports on the measurement of fluid (water) pressure distribution at a soft (polyurethane) pad/steel interface. The distribution of the interfacial fluid pressure has been measured ...

Abstract: Pressure and shear flow factors (Patir and Cheng, 1978) were used to take into account the roughness of the pad surface in the modeling of the interfacial fluid pressure during chemical ...

Abstract: Prior work has shown that there exist a sub-ambient fluid pressure at the interface between a rigid flat and the polishing pad during chemical mechanical polishing (CMP). This sub-ambient fluid ...

Abstract: Previous experimental work has shown that negative fluid pressure does develop at the disk/pad interface during chemical mechanical polishing. However, these studies dealt with one-dimensional ...