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Modeling and Dynamic Characterization of the Czochralski Crystal Growth Process
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: A lumped parameter model of the Czochralski crystal growth process is proposed that captures the dominant nonlinear dynamics, internal coupling, and disturbance structure. Conventional and advanced ...
Control and System Design for the Czochralski Crystal Growth Process
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: An expanded set of control objectives is proposed for the Czochralski crystal growth process. Consideration of the thermal stress near the interface yields an operating regime specification in ...
Dynamic Modeling Analysis for Control of Chemical Vapor Deposition
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: A nonlinear dynamic model of the chemical vapor deposition (CVD) process has been developed to aid design of a closed-loop control system. A lumped control volume analysis is used to capture ...
Analysis of Induction Plasma Deposition Dynamics for Control
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: Plasma torches are used in a variety of different applications including forming corrosion and wear resistant coatings, near net shape manufacture, and production of metal matrix composites. The ...
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