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Modeling and Dynamic Characterization of the Czochralski Crystal Growth Process
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: A lumped parameter model of the Czochralski crystal growth process is proposed that captures the dominant nonlinear dynamics, internal coupling, and disturbance structure. Conventional and advanced ...
Control and System Design for the Czochralski Crystal Growth Process
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: An expanded set of control objectives is proposed for the Czochralski crystal growth process. Consideration of the thermal stress near the interface yields an operating regime specification in ...
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