Uncertainty Analysis in Surface Micromachined Force Gauges: Convex Model ApproachSource: Journal of Aerospace Engineering:;2004:;Volume ( 017 ):;issue: 001Author:Nii O. Attoh-Okine
DOI: 10.1061/(ASCE)0893-1321(2004)17:1(40)Publisher: American Society of Civil Engineers
Abstract: The paper presents a general framework for analyzing uncertainties in material and geometrical properties of a microforce gauge. Since fabrication of the microgauge is surface micromachining of microelectromechanical systems (MEMS), it has inherent variations that lead to both material and geometrical uncertainties. A convex model is used as a tool for addressing uncertainties in microforce gauge analysis. Mathematical derivations of convex models are presented and advantages of the convex approach over the standard statistical and probability approach in analyzing uncertainty in MEMS devices is highlighted.
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| contributor author | Nii O. Attoh-Okine | |
| date accessioned | 2017-05-08T21:16:10Z | |
| date available | 2017-05-08T21:16:10Z | |
| date copyright | January 2004 | |
| date issued | 2004 | |
| identifier other | %28asce%290893-1321%282004%2917%3A1%2840%29.pdf | |
| identifier uri | http://yetl.yabesh.ir/yetl/handle/yetl/44999 | |
| description abstract | The paper presents a general framework for analyzing uncertainties in material and geometrical properties of a microforce gauge. Since fabrication of the microgauge is surface micromachining of microelectromechanical systems (MEMS), it has inherent variations that lead to both material and geometrical uncertainties. A convex model is used as a tool for addressing uncertainties in microforce gauge analysis. Mathematical derivations of convex models are presented and advantages of the convex approach over the standard statistical and probability approach in analyzing uncertainty in MEMS devices is highlighted. | |
| publisher | American Society of Civil Engineers | |
| title | Uncertainty Analysis in Surface Micromachined Force Gauges: Convex Model Approach | |
| type | Journal Paper | |
| journal volume | 17 | |
| journal issue | 1 | |
| journal title | Journal of Aerospace Engineering | |
| identifier doi | 10.1061/(ASCE)0893-1321(2004)17:1(40) | |
| tree | Journal of Aerospace Engineering:;2004:;Volume ( 017 ):;issue: 001 | |
| contenttype | Fulltext |