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contributor authorNii O. Attoh-Okine
date accessioned2017-05-08T21:16:10Z
date available2017-05-08T21:16:10Z
date copyrightJanuary 2004
date issued2004
identifier other%28asce%290893-1321%282004%2917%3A1%2840%29.pdf
identifier urihttp://yetl.yabesh.ir/yetl/handle/yetl/44999
description abstractThe paper presents a general framework for analyzing uncertainties in material and geometrical properties of a microforce gauge. Since fabrication of the microgauge is surface micromachining of microelectromechanical systems (MEMS), it has inherent variations that lead to both material and geometrical uncertainties. A convex model is used as a tool for addressing uncertainties in microforce gauge analysis. Mathematical derivations of convex models are presented and advantages of the convex approach over the standard statistical and probability approach in analyzing uncertainty in MEMS devices is highlighted.
publisherAmerican Society of Civil Engineers
titleUncertainty Analysis in Surface Micromachined Force Gauges: Convex Model Approach
typeJournal Paper
journal volume17
journal issue1
journal titleJournal of Aerospace Engineering
identifier doi10.1061/(ASCE)0893-1321(2004)17:1(40)
treeJournal of Aerospace Engineering:;2004:;Volume ( 017 ):;issue: 001
contenttypeFulltext


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