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    Temporary Bonding/Debonding of Silicon Substrates Based on Propylene Carbonate

    Source: Journal of Electronic Packaging:;2015:;volume( 137 ):;issue: 004::page 44501
    Author:
    Zhu, Zhiyuan
    ,
    Yu, Min
    ,
    Liu, Lisha
    ,
    Jin, Yufeng
    DOI: 10.1115/1.4031750
    Publisher: The American Society of Mechanical Engineers (ASME)
    Abstract: This paper researches temporary bonding/debonding based on propylene carbonate (PPC). The highest shear strength of 4.1 MPa was achieved when pure PPC was used as bonding adhesive. Room temperature debonding methods were investigated and compared with thermal debonding. Chemical debonding at room temperature was realized for bonding with the pure PPC. Several different chemicals can be used for chemical debonding. A photo acid generator (PAG)assisted debonding method was demonstrated at room temperature when PAGloaded PPC (PAGPPC) was used as bonding adhesive. The ultraviolet (UV) radiation was used to enhance the PAGassisted debonding.
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      Temporary Bonding/Debonding of Silicon Substrates Based on Propylene Carbonate

    URI
    https://yetl.yabesh.ir/yetl1/handle/yetl/157718
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    • Journal of Electronic Packaging

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    contributor authorZhu, Zhiyuan
    contributor authorYu, Min
    contributor authorLiu, Lisha
    contributor authorJin, Yufeng
    date accessioned2017-05-09T01:17:06Z
    date available2017-05-09T01:17:06Z
    date issued2015
    identifier issn1528-9044
    identifier otherep_137_04_044501.pdf
    identifier urihttp://yetl.yabesh.ir/yetl/handle/yetl/157718
    description abstractThis paper researches temporary bonding/debonding based on propylene carbonate (PPC). The highest shear strength of 4.1 MPa was achieved when pure PPC was used as bonding adhesive. Room temperature debonding methods were investigated and compared with thermal debonding. Chemical debonding at room temperature was realized for bonding with the pure PPC. Several different chemicals can be used for chemical debonding. A photo acid generator (PAG)assisted debonding method was demonstrated at room temperature when PAGloaded PPC (PAGPPC) was used as bonding adhesive. The ultraviolet (UV) radiation was used to enhance the PAGassisted debonding.
    publisherThe American Society of Mechanical Engineers (ASME)
    titleTemporary Bonding/Debonding of Silicon Substrates Based on Propylene Carbonate
    typeJournal Paper
    journal volume137
    journal issue4
    journal titleJournal of Electronic Packaging
    identifier doi10.1115/1.4031750
    journal fristpage44501
    journal lastpage44501
    identifier eissn1043-7398
    treeJournal of Electronic Packaging:;2015:;volume( 137 ):;issue: 004
    contenttypeFulltext
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    DSpace software copyright © 2002-2015  DuraSpace
    نرم افزار کتابخانه دیجیتال "دی اسپیس" فارسی شده توسط یابش برای کتابخانه های ایرانی | تماس با یابش
    yabeshDSpacePersian