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contributor authorZhu, Zhiyuan
contributor authorYu, Min
contributor authorLiu, Lisha
contributor authorJin, Yufeng
date accessioned2017-05-09T01:17:06Z
date available2017-05-09T01:17:06Z
date issued2015
identifier issn1528-9044
identifier otherep_137_04_044501.pdf
identifier urihttp://yetl.yabesh.ir/yetl/handle/yetl/157718
description abstractThis paper researches temporary bonding/debonding based on propylene carbonate (PPC). The highest shear strength of 4.1 MPa was achieved when pure PPC was used as bonding adhesive. Room temperature debonding methods were investigated and compared with thermal debonding. Chemical debonding at room temperature was realized for bonding with the pure PPC. Several different chemicals can be used for chemical debonding. A photo acid generator (PAG)assisted debonding method was demonstrated at room temperature when PAGloaded PPC (PAGPPC) was used as bonding adhesive. The ultraviolet (UV) radiation was used to enhance the PAGassisted debonding.
publisherThe American Society of Mechanical Engineers (ASME)
titleTemporary Bonding/Debonding of Silicon Substrates Based on Propylene Carbonate
typeJournal Paper
journal volume137
journal issue4
journal titleJournal of Electronic Packaging
identifier doi10.1115/1.4031750
journal fristpage44501
journal lastpage44501
identifier eissn1043-7398
treeJournal of Electronic Packaging:;2015:;volume( 137 ):;issue: 004
contenttypeFulltext


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