Three-Dimensional Measurements of Photo-curing Process With Photo-curable Resin for UV-Nanoimprint by Micro-digital-Holographic-PTV

Abstract

A high time-resolution measurement of flow field in a glass plate with glass cover with two holes was done by a micro-DHPTV system. The two holes mentioned here were also inside the photo-curable resin. Particle measurement was carried out during a 2 s time period that covered the time it took for the curing of resin. This curing time was theoretically calculated from the irradiation flux of the Ultraviolet (UV) source employed in the experiment. Moreover, temperature dependence of photo-curable resin was evaluated by measuring the resin at changing temperatures. Consequently, the tracking of seeding particles could instantaneously be recorded. The 3-D displacements, obtained from the particles being tracked, took place primarily along the direction of the depth. These values were found to be in good agreement with the theoretically calculated displacement values obtained from UV irradiation flux. Moreover, the displacement during photo-curing appeared to be proportional to the increase in temperature.