| contributor author | Bruce Kim | |
| contributor author | Haixin Zhu | |
| contributor author | Jiping He | |
| date accessioned | 2017-05-09T00:40:16Z | |
| date available | 2017-05-09T00:40:16Z | |
| date copyright | May, 2010 | |
| date issued | 2010 | |
| identifier issn | 1949-2944 | |
| identifier other | JNEMAA-28035#021010_1.pdf | |
| identifier uri | http://yetl.yabesh.ir/yetl/handle/yetl/144551 | |
| description abstract | This paper presents a novel structure for a neural sensor using a surface micromachining technique with dry-etch benzocyclobutene selected as the substrate and packaging material. The finished device has intracortical recording sites on both sides and epidural recording sites on the front. The design doubled the total channel number of recording sites compared with the conventional single-sided electrode structure. The developed process shows reliable, high fabrication yield, and preliminary fabrication and impedance test results suggest that this newly developed neural sensor could improve the performance and efficiency of neural recording. | |
| publisher | The American Society of Mechanical Engineers (ASME) | |
| title | Integrated Double-Sided Neural Sensor With Dry-Etch BCB | |
| type | Journal Paper | |
| journal volume | 1 | |
| journal issue | 2 | |
| journal title | Journal of Nanotechnology in Engineering and Medicine | |
| identifier doi | 10.1115/1.4001536 | |
| journal fristpage | 21010 | |
| identifier eissn | 1949-2952 | |
| keywords | Sensors | |
| keywords | Electrodes | |
| keywords | Etching | |
| keywords | Impedance (Electricity) | |
| keywords | Manufacturing AND Channels (Hydraulic engineering) | |
| tree | Journal of Nanotechnology in Engineering and Medicine:;2010:;volume( 001 ):;issue: 002 | |
| contenttype | Fulltext | |
