Machining a Micro/Meso Scale Structure Using a Minaturized Machine Tool by Using a Conventional Cutting Process

Abstract

Micro/meso scale parts, connectors, and couplers in optic communication and arbitrary 3D features are required in various fields of industry. In this paper, a miniaturized machine tool is developed to machine arbitrary 3D features in the micro/meso scale based on CNC and PC-NC technology. In the proposed system, a PI controller with antiwindup capability is adopted which helps micro/meso scale machining of components. For performance evaluation, a V groove and a 3D feature are machined using the proposed miniaturized machine tool.